Life Tests of a Microwave MEMS Capacitive Switch

Life tests have demonstrated the longevity of an electrostatically actuated capacitive switch of a microelectromechanical systems (MEMS) type suitable for handling radio signals having frequencies of multiple gigahertz. The tests were performed to contribute to understanding of factors that affect the reliability of MEMS switches in general and of how improvements in designs and materials can increase operational lifetimes of MEMS capacitive switches. The tests were based partly on the concept that data obtained in monitoring both high-speed and low-speed switching characteristics provide valuable insight into quantifying the lifetime properties of the switches and enable estimation of switching lifetimes under a variety of operating conditions.